JPH0474864B2 - - Google Patents

Info

Publication number
JPH0474864B2
JPH0474864B2 JP212387A JP212387A JPH0474864B2 JP H0474864 B2 JPH0474864 B2 JP H0474864B2 JP 212387 A JP212387 A JP 212387A JP 212387 A JP212387 A JP 212387A JP H0474864 B2 JPH0474864 B2 JP H0474864B2
Authority
JP
Japan
Prior art keywords
tool
leaf spring
fixed
mounting body
tool holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP212387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63169730A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP212387A priority Critical patent/JPS63169730A/ja
Publication of JPS63169730A publication Critical patent/JPS63169730A/ja
Publication of JPH0474864B2 publication Critical patent/JPH0474864B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP212387A 1987-01-08 1987-01-08 ボンダ−用ツ−ル保持機構 Granted JPS63169730A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP212387A JPS63169730A (ja) 1987-01-08 1987-01-08 ボンダ−用ツ−ル保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP212387A JPS63169730A (ja) 1987-01-08 1987-01-08 ボンダ−用ツ−ル保持機構

Publications (2)

Publication Number Publication Date
JPS63169730A JPS63169730A (ja) 1988-07-13
JPH0474864B2 true JPH0474864B2 (en]) 1992-11-27

Family

ID=11520574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP212387A Granted JPS63169730A (ja) 1987-01-08 1987-01-08 ボンダ−用ツ−ル保持機構

Country Status (1)

Country Link
JP (1) JPS63169730A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2835983B2 (ja) * 1990-10-31 1998-12-14 株式会社新川 ボンデイングヘツド
JP2016088576A (ja) * 2014-11-06 2016-05-23 オムロン株式会社 吸着ヘッドおよびそれを備える貼付装置

Also Published As

Publication number Publication date
JPS63169730A (ja) 1988-07-13

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